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SolidSense II® Series
SolidSense II® Series - Image 2
SolidSense II® Series - Image 3

SolidSense II® Series

SolidSense II® Pressure Transducers

Maximize process precision with accurate, stable, ultra-high purity control.

Models GF / GI

For measuring pressure in ultra-high purity and specialty gas applications across many industries, pressure transmitters and transducers must maintain stability and accuracy. That’s why Brooks Instrument SolidSense II® high pressure transducers combine weld-free, corrosion-resistant materials along with a design that delivers outstanding zero stability and accuracy within 0.25% of full scale.

We avoid the problems of zero and span drift, thermal shift and case stress that lead to maintenance and downtime issues with competitive high pressure transducers. Instead, SolidSense II® instruments deliver a robust, easy-to-maintain design that lowers the total cost of ownership.

Features

  • Materials: Pressure transmitter features annealed VIM-VAR 316L stainless steel body with one-piece, machined sensor.
  • No welds or joints with dissimilar materials
  • Pressure range: 30 to 3000 psi full scale
  • Models available with integrated display or full-function programmable display
  • Digital thermal compensation uses multi-point temperature-compensation method
  • Proprietary micro-machined silicon strain gauges exhibit very low zero drift
  • Fully swept flow path completely removes residual gas
  • Outputs: 4 to 20 mA, 0 to 10 Vdc, 0.05 to 5.05 Vdc

Benefits

  • Smooth surface finish and corrosion-resistant materials ensure contamination-free measurement – ideal for many semiconductor and industrial applications
  • Resistant to H2 embrittlement for longer life
  • Long-term, repeatable sensor performance under variable temperatures ensures reliable performance
  • Superior stability maintains accuracy
  • No initial zero adjustment reduces time spent on calibration
  • Two pairs of precision-matched strain gauge sensors ensure performance
  • Sensor attachment using glass fusion bonding relieves stress for longer life
  • Digital temperature compensation improves thermal stability over entire range of temperature

Applications

  • Semiconductor manufacturing
  • Ultra-high purity fluid storage and delivery systems
  • Thin-film processes
  • Chemical and petrochemical research
  • Laboratory and analytical projects
  • Food & beverage
  • Pharmaceuticals

Specifications

Performance Ratings Compliance

Product Type Pressure Transducers
Response Time < 5 msec
Accuracy 0.25% Full Scale (BFSL)
Proof Pressure 200% full scale up to 2,000 psi, 150% full scale for higher ranges
Burst Pressure 400% full scale
Pressure Range -15 psi – 3000 psi
Differentiator Ultra-High Purity
Flow Temperature Coefficient >100 PSI Ranges: Full Scale:+0.02% full scale/OF (-4OF to 140OF, -20OC to 60OC) +0.50% full scale (68OF to 140OF, 20OC to 60OC) 0 to 10 Vdc version

<100 PSI Ranges: Full Scale:+0.04% full scale/OF (-4OF to 140OF, -20OC to 60OC) +1.00% full scale (68OF to 140OF, 20OC to 60OC) 0 to 10 Vdc version
Mechanical
Materials of Construction Housing: Stainless steel, polymer plastics
Surface Finish Compliant with SEMI F19
Wetted Materials VIM-VAR 316L stainless steel, SEMI F20
Cleanliness Compliant to ASTM F1374-92 (2005)
Internal Volume 1.79cc
Process Connections Multiple configurations including tube, NPT, Face Seal and Surface Seal
Temperature Range Non-display version: -20OF to 180OF (-29OC to 82OC)
Integrated Display Version:-20°F to 140°F (-29°C to 60°C)
Temperature – Compensating -4OF to 140OF (-20OC to 60OC) / 68OF to 140OF (20OC to 60OC) 0-10 Vdc version
Temperature – Storage Non-display: -40OF to 180OF (-40C to 82OC)
Integrated display: -40°F to 167°F (-40°C to 75°C)
Electrical
Environmental Compliance RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
Certifications/Approvals EMC: Compliant to EU Directive 2004/108/EC
FM Approved: Non-Incendive for use in Class I, Div II Groups A, B, C and D Hazardous Applications
Power Requirements Display Version:10 to 30 Vdc for 4 to 20 mA output Integrated Display Version:15 to 30 Vdc for 4 to 20 mA output and no signal output

Display Version:11 to 30 Vdc for 0 to 5 Vdc output Integrated Display Version:11 to 30 Vdc for 0 to 5 Vdc output

Display Version: 13 to 32 Vdc for 0 to 10 Vdc output Integrated Display Version:13 to 30 Vdc for 0 to 10 Vdc output
Supply Current Non-display Version: Max. 10 mA
Integrated Display: Max. 30 mA
Analog Communication 0-5 Vdc, 0-10 Vdc, 0.2-5.2 Vdc, 2-10 Vdc, 4-20 mA

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