Features
|
Benefits
|
Applications
|
Specifications |
Performance Mechanical Electrical Compliance
| Flow Range (Full Scale Capacity) | 10 slm (N2 or H2 only) |
| Differentiator | Control Mode: Downstream or Upstream Ultra-High Purity Digital Pressure Control |
| Product Type | Pressure Controller |
| Accuracy | Pressure Reading: ± 1% of reading Pressure Control: ± 0.2% of F.S. <10% F.S.; ± 1% of reading >10% to 100% F.S. Flow Reading: ± 0.35% of F.S. 2-35% F.S. ; ± 1% of reading >35% F.S |
| Repeatability | < ±0.2% F.S. |
| Flow Temperature Coefficient | Zero: < 0.05% F.S./°C Span: < 0.08% of reading/°C |
| Max Pressure | 1000 Torr FS |
| Pressure Control Range | > 2 to 100% |
| Response Time | < 1 sec typ. (excluding system time constant) |
| Temperature Range | 10 – 50°C |
| Leak Integrity | External: 1 x 10-10 atm scc/sec He max |
| Seal Material | Metal |
| Level of Purity / Surface Finish | 5 µ inch Ra |
| Wetted Materials | SEMI F20 HP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel |
| Valve Options | Normally Closed |
| Environmental Compliance | RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006 |
| EMC | EC Directive 2014/30/EU CE: EN61326-1: 2013 |
| Power Supply / Consumption | DeviceNet™: 545 mA max @ +11-25 Vdc |
| Electrical Connection | DeviceNet™ via 5-Pin “M12” Connector |
| Digital Communication | DeviceNet™ |
| Analog Communication | — |
| Diagnostic Capability | Available |