Key Applications
- Semiconductor etch tools
- Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
- Physical vapor deposition (PVD) systems
- Epitaxial process systems
Performance Perfected for Semiconductor Processes
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Features
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BenefitsExceptional performance
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Specifications |
Mechanical Performance Ratings Diagnostics & Display Electrical
| Product Type | Mass Flow Controller |
| Differentiator | EtherCAT Communication High Purity/Ultra-High Purity Embedded Diagnostics Ultra-stable Flow Sensor Improved Valve Shutdown |
| Level of Purity / Surface Finish | 5 – 10µ inch Ra |
| Seal Material | Metal |
| Flow Temperature Coefficient | Span: 0.05% S.P. per °C Zero: 0.005% F.S. per °C |
| Zero Stability | < ±0.15% F.S. per year |
| Valve Shut Down | Standard GF Series: < 0.15% F.S. High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out |
| Number of Bins | Standard GF Series: 11 bins High-Flow GF Series: 4 bins |
| Control Range | Standard GF Series: 2-100% High Flow GF Series: 5-100% |
| Multi-Gas & Range Configurability | MultiFlo™ Standard (most models) |
| Pressure Transient Insensitivity | Specific models |
| Response Time | Normally Open Valve: <1.5 sec (specific models) |
| Response Time | Normally Closed Valve: 300 ms – < 1 sec SDS Gas Delivery: < 3 sec |
| Repeatability | < ±0.15% S.P. |
| Accuracy | Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20% High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% |
| Flow Range (Full Scale Capacity) | Standard GF Series: 3 sccm – 55 slm High Flow GF Series: 55 slm – 300 slm |
| Wetted Materials | SEMI F20 HP/UHP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel KM-45 |
| Valve Options | Normally Closed Normally Open (specific models only) Meter (no valve) |
| Max Temperature | 50oC |
| Differential Pressure Range | 3-860 sccm = 7-45 psid 861-7200 sccm = 10-45 psid 7201-55000 sccm = 15-45 psid 51 slm-300 slm = 30-90 psid SDS Models 10 Torr- 30 psid typical *Typical pressure drops. Contact Brooks Technical Support for more information. |
| Max Pressure | Standard GF Series: up to 500 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter) |
| Leak Integrity | 1×10-10 atm cc/sec He |
| Diagnostic Capability | Available |
| Status Lights | Run Error Power Network Status |
| Alarms | Control Valve Output Network Interruption Temperature High/Low Pressure High/Low Power Surge/Sag |
| Power Supply / Consumption | 24 Vdc, 7 Watts (Under typical operating conditions) |
| Electrical Connection | Power via 5-pin M8 Connector, EtherCAT via twin RJ45 |
| Digital Communication | EtherCAT® |
| Analog Communication | — |
| Display | Top Mount Integrated LCD Viewing Angle: Fixed Viewing Distance: 10 feet Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa) Resolution: 0.1 (unit) |
| Diagnostic / Service Port | Micro USB |