Features
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Benefits
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Key Applications
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Specifications |
Performance Mechanical Ratings Diagnostics & Display Electrical
| Product Type | Mass Flow Controller |
| Differentiator | High Purity/Ultra-High Purity Standard GF Series High Flow GF Series |
| Flow Range (Full Scale Capacity) | Standard GF Series: 3 sccm – 55 slm High Flow GF Series: 55 slm – 300 slm |
| Accuracy | ±1% S.P. > 35-100% ±0.35% F.S. 2-35% |
| Repeatability | < ±0.15% S.P. |
| Linearity | ±0.5% F.S. (included in accuracy) |
| Response Time | Normally Closed Valve: 700 ms – < 1 sec SDS Gas Delivery: < 3 sec |
| Response Time | Normally Open Valve: <1.5 sec (specific models) |
| Multi-Gas & Range Configurability | MultiFlo™ Standard (most models) |
| Pressure Transient Insensitivity | — |
| Control Range | Standard GF Series: < 3-100% High Flow GF Series: 5-100% |
| Number of Bins | Standard GF Series: 11 bins High-Flow GF Series: 4 bins |
| Valve Shut Down | Standard GF Series: < 1% F.S. High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out |
| Zero Stability | < ±0.5% F.S. per year |
| Flow Temperature Coefficient | Span: 0.05% S.P. per °C Zero: 0.005% F.S. per °C |
| Seal Material | Metal |
| Level of Purity / Surface Finish | 4 – 10µ inch Ra |
| Wetted Materials | SEMI F20 HP/UHP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel KM-45 |
| Valve Options | Normally Closed Normally Open (specific models only) Meter (no valve) |
| Max Temperature | 50oC |
| Differential Pressure Range | 3-860 sccm = 7-45 psid 861-7200 sccm = 10-45 psid 7201-55000 sccm = 15-45 psid 51 slm-300 slm = 30-90 psid *Typical pressure drops. Contact Brooks Technical Support for more information. |
| Max Pressure | Standard GF Series: 500 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter) |
| Leak Integrity | 1×10-10 atm cc/sec He |
| Diagnostic Capability | Available |
| Status Lights | MFC Health Network Status |
| Alarms | Control Valve Output Network Interruption |
| Diagnostic / Service Port | RS-485 via 2.5mm jack (all models) |
| Display | Top Mount Integrated LCD Viewing Angle: Fixed Viewing Distance: 10 feet Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa) Resolution: 0.1 (unit) |
| Analog Communication | 0-5 Vdc |
| Digital Communication | DeviceNet™ RS485 L-Protocol |
| Electrical Connection | Analog/RS485 via 9-Pin “D” connector DeviceNet™ via 5-Pin “M12” connector Various cable adaptors available. See product data sheet for more information. |
| Power Supply / Consumption | Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%) DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc (Under typical operating conditions) |
| Compliance | |
| EMC | EC Directive 2004/108/EC CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing) |
| Environmental Compliance | RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006 |