Features
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Benefits
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Applications
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Specifications |
Performance
| Product Type | Pressure Controller & Flow Meter |
| Temperature Range | 0 – 65°C |
| Max Pressure | 1500 psig |
| Ratings | |
| Response Time | Pressure Response Time: < 0.8 sec typical for a 0-100% command step with <2% pressure overshoot. Actual pressure response depends on system design. |
| Pressure Control Range | 100:1 for a remote transducer with a 0-10 V output |
| Pressure Range | Dependent upon remote pressure transducer |
| Flow Temperature Coefficient | 0.1% F.S. per °C |
| Repeatability | ±0.25% of rate |
| Accuracy | Flow Accuracy: ±1% F.S. including linearity at the calibration conditions ±1.5% F.S. for flow rates greater than 20 slm |
| Flow Range (Full Scale Capacity) | Any range 0 to 3 sccm to 0 to 30,000 sccm N2 Eq. |
| Differentiator | Remote Transducer Pressure Control & Flow Measurement |
| Leak Integrity | Inboard to Outboard Metal Seal: 1 x 10-10 atm cc/sec He max Elastomer Seal: 1 x 10-9 atm cc/sec He max |
| Mechanical | |
| Seal Material | Elastomer or Metal |
| Wetted Parts: Standard 316L/316L VAR Stainless Steel Valve Seat: Standard Viton® fluoroelastomers or metal External/Internal Seals: flouroelastomers or metal Optional: Buna-N, Teflon® or Kalrez® |
|
| Valve Options | Normally Closed Normally Open No Valve (elastomer, upstream configuration only) |
| Electrical | |
| Analog Communication | 0-5 V |
| Digital Communication | — |
| Electrical Connection | 15-Pin “D” Connector |
| Size | Compact |
| EMC | EMC Directive 89/336/EEC EN 61326-1 |
| Certifications/Approvals | — |
| Compliance | |
| Diagnostic Capability | |
| Power Supply / Consumption | Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA |