Features
|
Benefits
|
Key Applications
|
Specifications |
Performance Ratings Electrical
| Product Type | Mass Flow Controller |
| Linearity | Included in accuracy. |
| Repeatability | <±0.25% SP |
| Accuracy | 1% of FS |
| Flow Range (Full Scale Capacity) | 100 slm (N2 equivalent) |
| Differentiator | Highest Flow Range Proven, reliable technology |
| Response Time | <3 sec to within 2% of SP (per SEMI E17-91) |
| Zero Stability | |
| Mechanical | |
| Seal Material | Metal |
| Level of Purity / Surface Finish | — |
| Wetted Materials | 316L, 316L VAR, & high alloy ferric SS |
| Valve Options | Normally Open Normally Closed |
| Max Temperature | 105oC |
| Differential Pressure Range | 50 – 350 kPa (7 – 50 psid) |
| Max Pressure | 1 MPa (145 psi) |
| Leak Integrity | 1×10-10 atm cc/sec He (1×10-11 Pa m3 /sec) ±15 Vdc @ 350 mA (max) |
| Electrical Connection | 15-Pin “D” connector |
| Digital Communication | – |
| Analog Communication |
0-5 Vdc |
| Diagnostic Capability | – |