Features
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Benefits
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Key Applications
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Specifications |
Performance Ratings Diagnostics & Display
| Product Type | Mass Flow Controller |
| Differentiator | Large installed base with proven long term performance |
| Flow Range (Full Scale Capacity) | .06 sccm – 30,000 sccm |
| Accuracy | 1% F.S. incl. linearity 1.5% F.S. incl. linearity >20 slpm |
| Repeatability | 0.2% of rate |
| Linearity | ±0.5% F.S. (included in accuracy) |
| Response Time | Normally Closed Valve: <3 sec Optional: 600 msec |
| Multi-Gas & Range Configurability | – |
| Pressure Transient Insensitivity | – |
| Control Range | 2-3% – 100% |
| Number of Bins | N/A |
| Valve Shut Down | N/A |
| Zero Stability | < ±0.5% F.S. per year |
| Mechanical | |
| Seal Material | Metal |
| Level of Purity / Surface Finish | 316L VAR, 316L, and high alloy ferritic stainless steel |
| Wetted Materials | Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon® |
| Valve Options | Normally Closed, Normally Open Meter (no valve) |
| Max Temperature | 65oC |
| Differential Pressure Range | 5 – 50 psi (gas and range dependent) |
| Max Pressure | 1500 psi |
| Leak Integrity | 1×10-10 atm cc/sec He |
| Diagnostic Capability | – |
| Status Lights | MFC Health, Network Status |
| Alarms | Control Valve Output, Network Interruption |
| Diagnostic / Service Port | N/A |
| Electrical | |
| Analog Communication | 4-20 mA 0-5 Vdc |
| Digital Communication | – |
| Electrical Connection | 15 Pin D Connector (DA-15P) |
| Power Supply / Consumption | Normally Closed valve: 3.25 watts Normally Open valve: 10.5 watts |
| Compliance | |
| Environmental Compliance | N/A |
| EMC | (89/336/EEC) per 61326 |